JPH0748671Y2 - 分子線セル - Google Patents
分子線セルInfo
- Publication number
- JPH0748671Y2 JPH0748671Y2 JP1990050030U JP5003090U JPH0748671Y2 JP H0748671 Y2 JPH0748671 Y2 JP H0748671Y2 JP 1990050030 U JP1990050030 U JP 1990050030U JP 5003090 U JP5003090 U JP 5003090U JP H0748671 Y2 JPH0748671 Y2 JP H0748671Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- heater
- collar
- molecular beam
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002994 raw material Substances 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 description 9
- 230000007547 defect Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000012212 insulator Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990050030U JPH0748671Y2 (ja) | 1990-05-14 | 1990-05-14 | 分子線セル |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990050030U JPH0748671Y2 (ja) | 1990-05-14 | 1990-05-14 | 分子線セル |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0413057U JPH0413057U (en]) | 1992-02-03 |
JPH0748671Y2 true JPH0748671Y2 (ja) | 1995-11-08 |
Family
ID=31568230
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990050030U Expired - Fee Related JPH0748671Y2 (ja) | 1990-05-14 | 1990-05-14 | 分子線セル |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0748671Y2 (en]) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01298092A (ja) * | 1988-05-24 | 1989-12-01 | Nec Corp | 分子線発生装置 |
-
1990
- 1990-05-14 JP JP1990050030U patent/JPH0748671Y2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0413057U (en]) | 1992-02-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |